The Zeiss Ultra 60 FE-SEM has a Schottky field emission source and can accommodate samples up to 200mm in diameter and 36 mm tall through the loadlock.

The system has an operating voltage range of 200V to 30kV. Integrated accessories include:

• An Oxford 50mm2 SDD EDS detector with AZtec software
• A Gatan Monarc CathodoLuminescence (CL) detector with Digital Micrograph software that includes automatic stage control to create large-area CL montages
  
  
   

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