Thermo Helios 5 CX FIB-SEM
The Thermo Fisher Helios 5CX Focused Ion Beam-Scanning Electron Microscope (FIB-SEM) is a tool which provides high resolution SEM imaging as well as Ga+ ion beam milling.
Specifications:
- 1 nm SEM resolution in ultra-high resolution (UHR) mode
- A 70mm2 Gatan-EDAX EDS detector,
- A Quorum cryo-system for cryo-milling, and
- A Bruker PI89 pico-indenter system for in-situ mechanical testing under SEM observation.
- Maps SW for automatic stage control to generate large-area images.
- Auto Slice&View to generate 3D volumetric scans of images and analytical data.
The primary purpose of this instrument is fabricating delicate TEM/STEM samples and making cross-section SEM views by milling.