Thermo K Alpha XPS

Thermo K Alpha XPS

The K-alpha X-ray Photoelectron Spectroscopy (XPS) system is an analytical instrument that directs a monochromatic beam of x-rays onto a sample and detects the ejected characteristic electrons. The system can detect and quantify elements from Li to U. The measurement is highly surface sensitive – the typical detection depth is ~5 nm – and can detect light elements such as Si (Z =14) and below at about 1% of the total surface composition and heavier elements down to ~0.1 %.  An integrated sputter gun allows both sample surface cleaning and controlled material removal for probing deeper into the sample bulk to examine elemental depth profiles. The system is fully automated and has a wide array of data analysis options.

 

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Spectrum of Graphene on SiC

 

Spectrum of Graphene on SiC 

Deconvolution of Carbon spectrum in a graphene oxide film on SiC shows XPS ability to distinguish chemical states.  

 

 

Area Map Overlay

 

Area Map Overlay 

Nitrogen-rich areas -in Red on map above – show amine-terminated spots on a Ti layer.  The map is overlaid on an optical image of the sample. 

 

 

Depth Prof of PZT

 

Depth Prof of PZT 

An integrated Ar sputter gun allows in-situ sample cleaning and depth profiles like the one above on a multi-layer PZT film.