Rates effective 12/1/2022
Billing Note: Listed equipment and services are charged as direct materials and supplies (M&S.) Overhead costs may also apply (see below for overhead costs.)
Cleanroom Rates Table
Rates are for logged cleanroom activity (charged for time spent inside cleanroom tool suite doors and for certain “always billable” tool type runs that extend past users' time inside cleanroom doors.)
Hourly charges accrue until tools are logged out (if beyond time spent inside cleanroom doors). Tool logout times contribute to billable durations. (click here for list of always billable tools)
| Activity | US Academic Rate (Direct Cost) | Foreign Academic/Industry Rate (Direct Cost) |
|---|---|---|
| Pettit and Marcus Inorganic Cleanroom Entry Fee | $250 per month | $700 per month |
| Marcus Organic Cleanroom Entry Fee (currently waived) | $0 per month | $0 per month |
| Hourly Fee for All Cleanrooms | $25 per hour (total of billable durations capped at 120 hours per service quarter) | $25 per hour (no cap) |
| Cleanroom Tools – Regular | Covered by $25 hourly fee (rate goes to $0 after cap is reached) | Cost covered by $25 hourly fee |
Cleanroom Tools –-“Always Billable” Hourly charges accrue until tools are logged out (if beyond time spent inside cleanroom doors). Tool logout times contribute to billable durations. (click here for list of always billable tools) | Covered by $25 hourly fee (rate goes to $0 after cap is reached) | Cost covered by $25 hourly fee |
Exterior to Cleanroom Hourly Equipment Table
Rates for these equipment items will be charged as noted below. More information at sums.gatech.edu (“Search Equipment and Services”)
Except for the Elionix ELS-G100 EBL, the below-listed tools are outside of the cleanroom.
| Activity | US Academic Rate (Direct Cost) | Foreign Academic/Industry Rate (Direct Cost) |
|---|---|---|
| Wyko NT2000 Profilometer (VEECO) | $25 per hour | $35 per hour |
| Aerosol Jet 200 system (Optomec) | $35 per hour | $40 per hour |
| Optec WS Flex Laser Micromachining Base System | $45 per hour | $51 per hour |
| EBL Machine Time | $70 per hour | $105 per hour |
| Dage X-Ray XD7600NT (Lab - Pettit 160) | $25 per hour | $35 per hour |
| Finetech Sub-micron Flip-chip Bonder (Lab - Pettit 160) | $25 per hour | $35 per hour |
| Hermes LS500XL CO2 laser (Lab - Pettit 161) | $25 per hour | $35 per hour |
| Elionix ELS-G100 EBL System (Marcus Inorganic Cleanroom) Cleanroom Fees will also be charged. | $70 per hour | $105 per hour |
| Resonetics IR laser (Lab - Pettit 161) | $25 per hour | $35 per hour |
| SCS Parylene Coater (Lab - Pettit 160) | $25 per hour | $35 per hour |
Micro- and Nano-Fabrication Service Center Rates Table
The IMS Micro and Nano Fabrication Service Center provides cleanroom and laboratory consulting, processing, and measurement services for research groups who need assistance in designing and/or executing nano- and micro-technology work. Service center staff can help researchers develop project budgets based on the following established rates (direct costs.)
| Activity | US Academic Rate (Direct Cost) | Foreign Academic/Industry Rate (Direct Cost) |
|---|---|---|
| Staff operation or technical consultation | $100 per hour | $100 per hour |
| Cleanroom fee for use of cleanroom tool set | $25 per hour | $25 per hour |
| Lab tool fee (for exterior to cleanroom hourly equipment tool usage) | See hourly posted rates above | See hourly posted rates above |
Regarding Mask Shop work: Costs for contact prints using the staff time and cleanroom rates listed above are normally $60. Costs for photomasks using the rates listed above start at $120 and range upward, depending on file size.
Regarding Electron Beam Laboratory work: Because Elionix ELS-G100 EBL system is inside of the Marcus Inorganic Cleanroom, technical services for ebeam will include an additional $25 per hour cleanroom charge in addition to the listed staff and EBL tool charges.
Overhead Costs
The current fiscal year Facilities & Administrative (F&A) rates (a.k.a. overhead or indirect) can be found at the Georgia Tech Office of Sponsored Programs website. Georgia Tech will apply these charges at the project accounting level for Georgia Tech grants and contracts agreements. For FY 2023, this rate is 64.6%.
Special Billing and Cost Arrangements
For customer entities not covered by Georgia Tech grants, contracts, or other internal funds, special arrangements for direct billing will be done on a case by case basis, with the assumption that normal agreements are pending. In this situation, direct costs will be increased in order to make costs equal to what would be charged to research groups using funds subject to Georgia Tech F&A / overhead / indirect.